Elimination Technique of Fluorocarbon inside Rare Gas and its Mechanism

Yao Shaojun,  Hu Xiaomin,  Xiong Xianxin,  Chen Wenyu,   Chen Yutian^#
(Whuhan Irion and Steel(Group) Co., Wuhan 430083 ^#Beijing Tejin Electron-Vacuum Technology Co., Beijing 100088)

Abstract The rare gas that refined from atmosphere inevitably contains the fluorocarbon impurities. Because of the strong bond energy of C—F, CF₄ and C₂F₆ etc. are extremely stable. The diverse-alloy radically in Zr-Al can adsorb the CF₄ and C₂F₆ availably, producing the new steady compounds. The additives of small amount Ha, Ni, Ti and Sparse soil in La series make the crystal lattice of the alloy obviously varied, it enlarged the channels that the impurities enter the inner part from the surface of alloy, increased the Zr-Al alloy surface area, and lowered the reaction temperature. As a result the impurities such as CF₄ and C₂F₆ are eliminated entirely. This kind of alloy materials do not absorb rare gas, therefore can be used to purify rare gas.
Key words Zr-Al base multi alloy, Fluorocarbon compound, Rare gas

希有气体中碳氟化合物的净除技术及其机理初探

姚绍军 胡小敏 熊贤信 陈文宇 陈雨田^#
(武汉钢铁(集团)公司 武汉 430083 ^#北京有色金属研究总院 北京 100088)

摘要 空气分离法生产的希有气体中含有碳氟化合物，由于碳氟间的强键结力，CF₄与C₂F₆等全氟化物特别稳定。Zr-Al基多元合金能够有效地吸附CF₄和C₂F₆，同时生成新的稳定的化合物。添加少量铪、镍、钛、镧系稀土金属使多种金属间化合物的晶格发生明显变化，增大气体杂质由Zr-Al合金表面向内部扩散的通道，大大增加了Zr-Al合金的比表面积，降低了反应温度，从而更加彻底地净除CF₄和C₂F₆。这种材料不与Ar等希有气体反应，因此可以用来净除希有气体中的碳氟化合物杂质。
关键词 Zr-Al基多元合金 碳氟化合物 希有气体

姚绍军 男，26岁，双学士，现为武汉钢铁集团工程师。
2003-04-16收稿

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