The Development of Si₃N₄ Ceramic Joining Process

Zheng Shiyuan, Chen Jian^#, Cao Youming, Hu Debing
(Department of Chemistry and Environment Science, Western Chongqing University, Yongchuan 402168 ^# State Key Lab of
New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084）

Abstract In this paper, a systematic description of joining techniques of ceramic to itself and with metal, especially the development of Si₃N₄ ceramic direct brazing method、Si₃N₄ ceramic indirection brazing method, as well as the existing problem and resolving method were introduced；in the meantime, Si₃N₄ ceramic solid phase pressure diffusion soldering method and the rarely studied joining technique of Si₃N₄ ceramic glass-soldering method were also discussed.
Key words Silicon nitride, Joining, Brazing, Metallization

Si₃N₄陶瓷的连接研究进展

郑仕远 曹优明 胡德斌
(渝西学院化学与环境科学系 重庆永川 402168)

陈 健
(清华大学材料科学与工程系 新型陶瓷与精细工艺国家重点实验室 北京 100084)

摘要 在系统介绍陶瓷与陶瓷、金属的连接方法基础上，重点评述了Si₃N₄陶瓷的直接钎焊法和Si₃N₄陶瓷的间接钎焊法的连接工艺进展及其存在的问题和解决的措施，同时对目前研究较少的Si₃N₄陶瓷的玻璃焊法也进行了评述，并简介了Si₃N₄陶瓷的固相压力扩散焊法。
关键词 氮化硅 连接 钎焊 金属化

郑仕远 男，38岁，副教授，从事结构陶瓷的金属化研究。E-mail:xiemu_80@sohu.com
2002-01-04收稿，2002-09-25修回